Abstract
This study investigates the internal oxidation of Nb–Ru multilayer coatings with a cyclically gradient chemical concentration distribution along the growth direction after annealing in a 1% O2–Ar atmosphere at 600°C for 1h. X-ray photoelectron spectroscopy and transmission electron microscopy were used to analyze the oxidation behavior of Nb–Ru coatings. The results show that Nb oxidized preferentially in a Nb–Ru coating and partial Nb atoms oxidized to Nb5+, Nb4+, and Nb2+, but Ru remained in a metallic state. After annealing, the microstructure evolved to a laminated structure consisting of alternative crystalline Nb2O5 and Ru layers.
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