Abstract
In our X-ray full field microscopy experiments, we demonstrated a resolution better than 260 nm over the entire field of view of 80 μm × 80 μm at 30 keV. Our experimental setup at PETRA III, P05, had a length of about 5 m consisting of an illumination optics, an imaging lens and a detector. For imaging, we used a compound refractive lens (CLR) consisting of mr-L negative photo resist, which was fabricated by deep X-ray lithography. As illumination optics, we choose a refractive rolled X-ray prism lens, which was adapted to the numerical aperture of the imaging lens.
Highlights
Hard X-ray full field microscopy allows high resolution transmission imaging of samples, which are opaque for visible light
Today most of the X-ray microscopes installed at synchrotron radiation sources or with X-ray tubes are based on Fresnel zone plates
Our results show that this experimental setup has a high potential to revolutionize the field of hard X-ray full field microscopy, opening up new possibilities for studying materials in research and industry
Summary
1. Introduction Hard X-ray full field microscopy allows high resolution transmission imaging of samples, which are opaque for visible light. Full field microscopes for hard X-rays were strongly limited in resolution or required large distances between the optical components. We realized an X-ray full field microscope for 30 keV, with higher resolution and shorter setup length, using compound refractive lenses (CLR) out of mr-L negative photo resist.
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