Abstract
We observed a phenomenon of X-ray emission from various types of organic and insulating materials under irradiation of a low energy (30 kV) gallium ion beam. Energy dispersive X-ray spectrometer combined with a focused ion beam instrument could detect light elements with low K-shell electron excitation energy such as carbon, oxygen, fluorine, sodium and silicon. Effect of the current intensity of gallium ion beam on the normalized X-ray yield was investigated. It was found that a strong irradiation beam current could effectively enhance the normalized X-ray yield. [DOI: 10.1380/ejssnt.2006.365]
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