Abstract
An approach to calculation of reciprocal space maps of x-ray diffraction from partly relaxed multilayered epitaxial structures is reported. The theory takes into account the additional harmonics of wave field caused by the difference in the lateral projections of reciprocal vectors in the sample layers. The reciprocal space maps shown can be simulated on the basis of the dynamical diffraction theory and matrix method for boundary conditions, which are applicable to arbitrary experimental geometry. The developed theory explains the experimental results from several typical epitaxial structures in partly relaxed state.
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