Abstract
Wrinkle-based measurement of elastic modulus for a nano-scale thin film was analyzed. As a demonstrative example, the wrinkles of Pt films on a Polydimethylsiloxane (PDMS) substrate under compressive loading were formed with a well-defined wavelength, corresponding to the difference of elastic moduli between the films and substrates. The elastic modulus of the Pt nano-scale thin film measured with the wrinkle-based measurement was found to be consistent with that independently measured with micro-tensile test. Uncertainty of the wrinkle-based measurement was analyzed to figure out the main uncertainty components for the evaluation of elastic modulus measurement, and guidelines for the reliable wrinkle-based measurement were suggested.
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