Width determination for deep grooves based on a variable point spread function imaging model.

Abstract

In three-dimensional confocal microscopy, two-dimensional width measurement can be significantly influenced by the groove height. The groove height not only results in deformation of the input light field due to the effect of edge occlusions, but also introduces a defocus error to the detection plane. This paper proposes a new, to the best of our knowledge, edge-setting method to determine groove width, which engineers the point spread function to correct for the groove edge obstruction effect and develops an edge obstruction imaging model (EOIM) based on the variable point spread function. This model gives a relationship between the groove height and the normalized intensity at the groove edge and can use this relationship to determine the groove edge position that would result from focusing at the groove's lower surface. Experimental results show that an EOIM-based width determination method is more accurate than the traditional 1/4 edge-setting method. Compared to the 1/4 edge-setting method, the deviation from a reference width measured with traceable scanning electron microscopy is reduced by a factor of 2.1 with a 1.3 times smaller standard deviation.