White-Beam Transmission Characterization of Texture in Mo Thin Films and Mo/W Multilayers

Abstract

ABSTRACTSynchrotron white-beam (polychromatic) x-ray radiation was used in a transmission Laue study of texture in monolithic mo films and Mo/W Multilayers. High intensity synchrotron radiation permits x-ray diffraction study of mo specimens >100μm in thickness, while 6μm is the practical thickness limit for a transmission study using a rotating anode x-ray source. The transmission Laue technique permits the collection of preferred orientation data from several families of diffracting planes on one photographic exposure. Polychromatic x-rays facilitate collection of diffraction information from a range of planar orientations without altering the orientation of the sample with respect to the incident x-ray beam. The texture information from a 35μm thick monolithic mo film and a 31μm thick multilayer of mo and W is presented. Two-fold symmetry seen in the {211} plane diffraction ring of the multilayer demonstrated both an in-plane and out-of-plane texture with a <110> growth direction. Three fold symmetry seen in the {310} and {222} plane diffraction rings of the monolithic mo film demonstrated both in-plane and out-of-plane texture which suggests a <111> growth direction.