Abstract
Waveguide-enhanced Raman spectroscopy (WERS) using nanophotonic waveguides has been used to demonstrate the detection of vapor-phase chemicals and liquid-phase biomolecules in water. The technique benefits from the fabrication processes and tolerances of CMOS foundries, but successful foundry-based WERS photonic integrated circuits (PICs) have only been demonstrated using excitation wavelengths of 1064 nm and 785 nm. Foundry-based PICS are beginning to operate with low loss at visible wavelengths, and WERS is uniquely poised to take advantage of this capability. Raman scattering cross-sections scale as λ<sup>−4</sup>, so a visible WERS platform could enable increased sensitivity, decreased exposure times, and/or decreased laser powers. However, increased fluorescence, increased waveguide loss, and decreased feature sizes make WERS in the visible challenging. Here, we demonstrate WERS using 300-mm foundry-based fabrication (AIM Photonics) with 633 nm and 785 nm laser excitation. We also show the successful operation and integration of other required components for a compact WERS system operating in the visible, including edge-couplers and lattice filters.
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