Abstract

Planar metasurfaces provide exceptional wavefront manipulation at the subwavelength scale by controlling the phase of the light. Here, we introduce an out-of-plane nanohole-based metasurface design with the implementation of a unique self-rolling technique. The photoresist-based technique enables the fabrication of the metasurface formed by nanohole arrays on gold (Au) and silicon dioxide (SiO2) rolled-up microtubes. The curved nature of the tube allows the fabrication of an out-of-plane metasurface that can effectively control the wavefront compared to the common planar counterparts. This effect is verified by the spectral measurements of the fabricated samples. In addition, we analytically calculated the dispersion relation to identify the resonance wavelength of the structure and numerically calculate the phase of the transmitted light through the holes with different sizes. Our work forms the basis for the unique platform to introduce a new feature to the metasurfaces, which may find many applications from stacked metasurface layers to optical trapping particles inside the tube.

Highlights

  • In recent years, metamaterials with unusual electromagnetic properties have provided extensive control on the response of electromagnetic waves with the arrangement of subwavelength antennas.[1,2] the two-dimensional counterparts of metamaterials have been extensively studied to achieve applications such as metalenses,[3−5] beam steering devices,[6] color filters,[7] visual gas sensing,[8] holography,[9] and optical trapping[10] devices

  • Different levels of manipulation and efficiency were obtained in these applications, which are provided by the arrangement of different antennas such as Vshaped antennas,[11] elliptical,[12] square nanoposts,[13] and perforated nanovoids or nanoholes.[14,15]

  • Over the last several years, these nanohole arrays delivered interesting features and applications from extraordinary transmission[20] to enhanced biosensing[21] and realization of the negative refractive index.[22−24] Lately, Matsui et al brought metal-dielectric hole arrays to the metasurface applications using different shapes to control the phase of the transmitted light.[25]

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Summary

Introduction

Metamaterials with unusual electromagnetic properties have provided extensive control on the response of electromagnetic waves with the arrangement of subwavelength antennas.[1,2] the two-dimensional counterparts of metamaterials (metasurfaces) have been extensively studied to achieve applications such as metalenses,[3−5] beam steering devices,[6] color filters,[7] visual gas sensing,[8] holography,[9] and optical trapping[10] devices. Over the last several years, these nanohole arrays delivered interesting features and applications from extraordinary transmission[20] to enhanced biosensing[21] and realization of the negative refractive index.[22−24] Lately, Matsui et al brought metal-dielectric hole arrays to the metasurface applications using different shapes to control the phase of the transmitted light.[25] an inclined wavefront for beam steering in the near-infrared range has been achieved using a gradual change in the hole size.[26] These inverted metasurfaces in contrast to the regular ones lead to a significantly higher signal-to-noise ratio and efficient focusing of the incident light.[15] the fabrication of such structures is typically based on subsequential layer deposition of metal and dielectric, which require precise control on the deposition of each layer For research applications, such an approach is time-consuming and limited by the uniformity and reproducibility of each layer, given the involvement of multiple steps of deposition. The strain-induced selfrolling method, known as the thin-film self-rolling technique for three-dimensional (3D) rolled-up tubes (RUTs), has been used in different fields after it was introduced in semiconductor bilayers grown by molecular beam epitaxy (MBE),[27] including

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