Abstract
A review of VLSI (very large-scale integration) technology is presented to discuss new technology, materials, devices and system organization. Advances in VLSI technology may have impact on sensor research in that (a) novel processes and device designs developed in VLSI may provide the means to realize improved semiconductor sensors and processing circuits; and (b) the integration of sensors with signal-processing and decision-making circuits makes the complex intelligent sensor possible. Intelligent sensors can be grouped into (a) sensors with processing circuits and active devices to improve signal-to-noise ratio; (b) sensors with electronic circuits for signal processing and decision making to convert signals to various forms ready for further manipulation. Functions of intelligent transduces are discussed with examples. Interaction between VLSI and transducer design as well as problems in incorporating VLSI technology into sensor research are discussed. Problem areas in materials, process compatibility and packaging are outlined.
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