Abstract
A versatile photolithographic photoplotter based on a stan- dard photoreduction stepper, where the reticle is replaced by a commer- cial liquid crystal microdisplay, is reported. The microdisplay module is designed as a drop-in replacement, allowing the photoplotter to be sim- ply and quickly converted into a standard stepper, making it an extremely versatile, low-cost research and development tool. Binary and multilevel plotting are demonstrated with plot rates of several Mpixels/s and 1-m feature sizes into standard industrial photoresist. The limitations on plot rate and resolution are presented and techniques for overcoming them discussed. © 2007 Society of Photo-Optical Instrumentation Engineers.
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