Abstract
Single crystals of congruent X-cut lithium niobate (LiNbO 3) and Mg-doped (5 mol% MgO in melt) Z-cut lithium niobate were implanted with 100 keV W + ions at room temperature to a fluence of 5 × 10 14 cm −2. The samples were annealed in a conventional furnace under flowing wet oxygen in two steps, first at 600°C for 1 h and subsequently at 850°C for 4 h in order to anneal the layer amorphized by the implantation. Rutherford Backscattering (RBS) angular scans were performed for different axial directions for Nb and W. For the congruent sample the lattice position of W was unambiguously determined to be the Nb site. The influence of the valence of tungsten on the incorporation into lithium niobate is discussed. On the other hand, for the Mg-doped sample the persistence of lattice damage after annealing did not enable a definite determination of the lattice site.
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