Abstract
The Edwards High Vacuum EXT range of turbomolecular vacuum pumps has been extended by the introduction of a new model, the EXT350. With a nitrogen pumping speed of 3601s-1, the new pump complements the EXT200 and 500 to give a range with models to suit all applications. With recent advances in engineering materials and the introduction of state-of-the-art controllers, turbomolecular pumps offer the reliability and simplicity of operation required by the new generation of vacuum users who see high vacuum and ultra-high-vacuum as production tools and enabling technology not only in the semiconductor industry but also in a wider variety of industrial and general scientific roles. The new pumps, together with the EXC series of solid state controllers, make the most of the latest in high-speed high-vacuum pumping technology without sacrificing reliability and are suitable for applications at pressures down to 10-9 mbar. T1
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