Abstract
Experimental results on ArF laser treatment of nanocrystalline diamond films in borazine (B 3N 3H 6) and ammonia (NH 3) vapors are reported. It is shown that pulsed UV irradiation results in boron and/or nitrogen atoms intergrain diffusion into the film along with surface synthesis of continuous ultra-thin BCN and CN compound layers, respectively. A significant reduction of electron field emission thresholds as a result of this treatment was observed. This effect is shown to be not connected with laser surface graphitization or formation of bulk defects.
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