Abstract
Microtribology characteristics were determined by using a combination of single asperities and three types of FIB (focused ion beam)-processed cantilevers for AFM (atomic force microscope). First, single gold asperities were rubbed with single and parallel leaf springs. For the parallel leaf spring, the pull-off force was proportional to the worn area of the gold asperity peak. The total volume of the gold asperity only slightly changed with rubbing. Second, the friction force on a worn asperity was measured by using a double parallel leaf spring, and the results showed that the friction force was proportional to the sum of the normal load and the pull-off force.
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