Abstract
The influence of the angle of incidence of low energy ions on the emission of secondary particles from solid surfaces can be investigated by using cylindrical targets in a low pressure plasma. It is shown that the distribution of the angle of incidence of the impinging ions becomes independent of plasma conditions and bombarding parameters, when the diameter of the Langmuir sheath around the target is sufficiently large compared with that of the cylindrical target. Experimental results on the influence of the angle of ion incidence on the secondary electron emission coefficient and the sputtering yield are reported for polycrystalline Mo bombarded with A+-ions from 300 to 900 eV.
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