Abstract

Terbium ions were implanted into Fe films at room temperature in the presence of a static magnetic field. Faraday M-H loops of those films indicated that a uniaxial magnetic anisotropy was induced by the implantations with a Tb ion dose typically higher than about 6×1014 ions/cm2 at an ion energy of 70 keV. The easy axis was parallel to the direction along which the static magnetic field was applied during the implantation. The change of M-H loop showing such uniaxial anisotropy is discussed on the basis of the multilayer structure with a Tb-Fe alloy layer sandwiched by Fe layers formed at the time of the implantation.

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