Abstract

Self-powered pressure sensors are critical devices in IoT sensing networks. Continuous efforts have been made in the community to improve the device performances by optimizing the materials selection and structural configurations. Therefore, a design platform for understanding the device-machine interface is imperative. This work presents a comprehensive study that uses the fundamental working principles of dipole moments in ferroelectret polymers to describe the energy conversion mechanism. The study addresses discrepancies in voltage measurements caused by instruments with different internal resistances and sampling rates. A lumped parameter model is also proposed and validated to explain the impedance mismatch at the device-machine interface. Applications including control of MEMS microactuator through static response and dynamic pressure sensor array for impact distribution sensing have also been demonstrated.

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