Abstract

The article reviews studies on the development of new methods of ion treatment of materials. New approaches are considered to multielement implantation on the basis of pulsed-periodic formation of composition-controlled ion fluxes. Various ways of obtaining high implant concentrations and forming thick and thin coatings by pulsed-periodic irradiation of materials with with ion beams and plasma streams alternating in time are discussed. Unconventional methods of treatment of inside surfaces of products are considered.

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