Abstract
Recently, ultraviolet (UV) detectors based on surface acoustic wave (SAW) devices utilizing the acoustoelectric effect have been demonstrated. However, most of presented cases were based on semiconductor sensing films. Sensors with nanostructure sensing material not only possess high sensitivity but also accelerate response and recovery time due to their high surface‐to‐volume ratio and fast charge diffusion rate. In this paper, ZnO‐nanostructure and a dual delay line SAW oscillator system are combined to develop a high precision UV detector. The UV detector is made of ZnO nanorod on a 128oYX‐LiNbO3 based SAW device. The operating frequency is around 145MHz. The system is illuminated by a UV source consists of a Xe lamp and a monochromator, resulting in frequency shifts. The frequency shifts related to different light wavelengths and power are measured and discussed. Results show the ZnO‐nanostructure based SAW oscillator is a promising candidate for a real‐time and high precision UV detector.
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