Abstract
Aluminum oxynitride (AlON) can be effectively finished by ultra-precision grinding. In this work, the ultra-precision grinding experiment was conducted on AlON to investigate surface characteristics and material removal mechanism. The ground surface has an unusual non-uniform morphology resulted from the different material removal modes. Grazing incidence X-ray diffraction (GIXRD), nanoindentation and Electron Back-Scattered Diffraction (EBSD) were carried out to study the micro-properties of AlON. The results revealed that the micro mechanical properties vary with the grain orientation on the surface. The morphologies of ground surface are consistent in the twinned grains and change with the grain orientation. By comparing the relationship of machining size and grain size, the material removal modes of individual grains should be taken into consideration during ultra-precision grinding. Based on this, a simple theoretical model was proposed to explain the material removal mechanism of AlON under ultra-precision grinding.
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