Abstract
The processes limiting the accuracy or range of total pressure measurements in the UHV range by ionization gauges are examined. These processes include x-ray induced photoemission, ion currents resulting from electron stimulated desorption, Kingdon orbits of the ions in Bayard–Alpert gauges, variations in electron yield by ion impact at electrode surfaces, and the effects of variations in electrode geometry. The various methods and designs of UHV ionization gauges that have been developed to reduce or eliminate these limiting processes are critically reviewed.
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