Abstract
A new approach using a system in vacuo with a dynamic gas flow named “ultrafine particles beam deposition,” was proposed as a technique for handling ultrafine particles. To create a gas beam flow, three types of sampling and transportation methods for ultrafine particles were tested. In these sampling and transportation methods, the sampling method using a skimmer and differential pumping gave the best results since it enables sampling of hot ultrafine particles soon after they are produced and carries them without collision in a directional gas flow. A narrow size distribution for ultrafine particles ranging from 3 nm to 13 nm could be obtained in the case of ultrafine Fe particles. As a result, the deposited film obtained using such small ultrafine particles showed a metallic luster as grown and characteristics such as specific electric resistance, coercive force and crystalline property similar to those of bulk Fe metal.
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