Abstract

The physics of highly excited semiconductors has recently been the subject of many studies, especially in connection with the problem of pulsed laser annealing. Careful experiments [1–3] have now been performed with the temporal resolution required to demonstrate that one single picosecond or femtosecond pulse can produce melting at the surface of silicon. Since the carrier relaxation time is very short ( 1020 cm−3) and hot (Te > 2000°K) plasma close to but below the melting phase transition in Si and GaAs.

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