Abstract
An ultracompact polarizing beam splitter (PBS) is designed and fabricated based on a single-material birefringent photonic crystal structure. The fabrication method is based on e-beam physical vapor deposition where an oblique angle deposition technique is also incorporated. The PBS is designed for high tolerances in volume production. The main ingredient of the PBS is an alternating high- and low-refractive-index modulation created from titanium dioxide deposited at angles of 0° and 70°. The measurements exhibited successful separation of two states of polarization with efficiencies of more than 92% over a total device length of under 6μm.
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