Abstract
Spiral-structure metamaterial (SSM) is of great importance, however, there is less methods to fabricate SSM due to the limitations of material particularity and working accuracy. In this paper, a systematic scheme for fabricating SSM is proposed by employing the metal mold making with diamond-based ultra-precision turning technique and moulding replication method. By studying the path planning algorithm of the turning, moulding error law and a technique of how to compensate the error, a solution for SSM is consequently formed. Our experimental results show a satisfying SSM with the surface roughness under 5 nm and the surface shape error under 0.63 percent of the designed wavelength (30 um). Moreover, this SMM element is processed within 10 min, with low cost in materials and process. Based on these advantages, our SSM processing scheme shows a remarkable potential in precise fabricating phase plates and industrialized application of terahertz metamaterial in the future. Key words: Micron/nano-fabrication, Spiral-structure matamaterial, optics, Terahertz optics elements,
Highlights
Spiral-structure metamaterial (SSM) can modulate the beam of an electromagnetic plane wave into a spiral wave by controlling the spiral state of the electromagnetic wave
We propose a method to fabricate the SSM in a wavelength range in 30 um ∼1 mm, which has an important application in many fields, such as quantum optics, communication, and sensing detection [1– 4]
By developing a process method for the diamond turning and molding technology, we have accomplished a precision process of SSM, which provides an effective means for the bulk-production of SSM
Summary
Spiral-structure metamaterial (SSM) can modulate the beam of an electromagnetic plane wave into a spiral wave by controlling the spiral state of the electromagnetic wave. By applying the single-point diamond turning mold and using the error compensation technique, the error between device and design parameters can be reduced, and the SSM can be fabricated with high efficiency, high precision, and at a low cost.
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