Abstract
Micro lens array is widely used in photonics and telecommunication products, including back-light module of flat panel display devices and white-light LED illumination. The ultra precision diamond shaping method together with tool servo technique was studied and developed in this research to generate elliptical micro lens array. Each elliptical micro lens has radii in X and Y direction of 1.0 mm and 1.5 mm respectively. A high filling-factor (100 %) elliptical micro lens array with form accuracy better than 0.15μm and surface roughness around 5nm Ra was successfully fabricated.
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