Abstract

Inverse design effectively promotes the miniaturization of integrated photonic devices through the modulation of subwavelength structures. Utilizing a theoretical prior based inverse design, we propose an ultra-compact integrated polarizing beam splitter consisting of a standard silicon-on-insulator (SOI) substrate and a tunable air–silicon column two-dimensional code metasurface, with a footprint of 5 × 2.7 μm2. The effective refractive index of the waveguide is modulated by adjusting the two-dimensional code morphology in the additional layer to achieve efficient polarization beam splitting. The simulation results demonstrate high performance, with a low insertion loss (<0.87 dB) and high extinction ratio (>10.76 dB) in a bandwidth of 80 nm covering the C-band. The device can withstand manufacturing errors up to ±20 nm and is robust to process defects, such as the outer proximity effect, and thus is suitable for ultra-compact on-chip optical interconnects.

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