Abstract

Recently, two-dimensional and three-dimensional periodic dielectric structures have been directly fabricated by laser holographic lithography to create novel geometric structures with high-precision tolerances. Multiple beam interference via beam splitting mirrors or diffractive optical elements produce iso-intensity contours that can be accurately recorded in photoresist and subsequently used as a template for creating photonic crystals with a complete or partial bandgap. We demonstrate single laser exposure method of forming three-dimensional photonic crystal templates in photoresist with multi-layer two-dimensional diffractive optical elements. Several photonic stopbands are identified in the near-infrared spectrum along multiple crystallographic directions.

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