Abstract
The investigation of As desorption from the (001) InP during metalorganic chemical vapor deposition was performed using surface photoabsorption (SPA). The behavior of the monochromatic SPA signal showed a clear existence of a metastable state after the AsH3 was turned off. SPA spectra at each stable surface were taken to confirm the interpretation. This result indicates that the previous criterion to measure the amount of As/P exchange reaction is not necessarily correct and that the As-desorption process should be understood as a two-step process.
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