Abstract
The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N2+O2 with pulsed inlet of oxygen. Two kinds of nanocomposite films were sputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(γ-Al2O3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(γ-Al2O3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses TO2. It was found that both nanocomposites are highly elastic films with relatively high hardness H=15 to 20GPa, low effective Young's modulus E⁎ satisfying the condition that the ratio H/E⁎>0.1, high elastic recovery We>60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.
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