Abstract
A two-dimensional simulation on a VHF H2 plasma (60 MHz) was performed using the plasma hybrid code, and plasma parameters were examined as a function of pressure for different discharge gaps. It was found that as the pressure increased, the H3+ and H+ densities as well as the electron density had a maximum at a certain pressure, and the maximum shifted to high pressures as the discharge gap decreased. On the other hand, the H2+ density decreased with the increase in pressure, independent of the discharge gap. The axial profiles of the H+, H2+, and H3+ densities showed that dominant ions were H3+ in our pressure range.
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