Abstract
A two-dimensional electrostatic einzel lens fabricated using microfabrication technology is described. The lens consists of cylindrical electrodes mounted in on two oxidised, silicon substrates, which are held apart by two cylindrical spacers. V-shaped grooves formed by anisotropic wet chemical etching are used to locate the electrodes and the spacers. The electrodes are metal-coated glass rods that are soldered to metal films deposited in the grooves. The lens is compatible with, and can be used as ion entrance optics for, a previously described quadrupole electrostatic lens. Data showing focusing over a range of ion masses and energies are presented, and the results are compared with a simulation of the electrostatic field and paraxial ion trajectories.
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