Abstract

We have investigated the influence of swift heavy ion (SHI) irradiation on the optical and dielectric properties of TiO2 thin films. Films with thickness of 80–100 nm were prepared by spin coating of sol precursor onto quartz substrates and were irradiated by 100 MeV Ag7+ ions at different fluences. The pristine sample was crystallized into single TiO2 anatase phase, exhibiting better than 80% transparency in the visible region. The optical absorption edge was found to decrease with the SHI fluence. The general behavior of the dielectric constant was found to obey Drude's theory. The effect of the SHI irradiation and fluence dependence on several optical parameters such as extinction coefficient, real and imaginary parts of dielectric constants, dispersive energy and packing density has been studied.

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