Abstract

A series of silver films were fabricated on silicon by magnetron sputtering method, which enables us to finely tune silver nanostructures by adjusting sputtering process. We studied the evolutional nanostructures obtained from sputtering time, and investigated their corresponding SERS effects. Results show that nanogroove-structured thin silver films have strongest Raman signal enhancement. This work provides a very fast, simple and reproducible way to fabrication of SERS-active substrate with tunable nanostructures.

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