Abstract
We report the design, fabrication, and test results of a tunable pyroelectric detector with an integrated micromachined Fabry-Perot FP filter for gas analysis in the mid-wave infrared MWIR. The new approach is based on a bulk micromachined Fabry-Perot interferometer with an air cavity, which is electrostatically tuned. Various types of movable reflectors and spring configurations are fabricated to determine the optimum solution with respect to maximum tuning range, low gravity influence on center wavelength, and suitable filter bandwidth. Short and long cavity filters are designed for the spectral ranges of 3 to 4.3 m and 3.7 to 5.0 m, respectively. The tunable filter is arranged on top of a current mode pyroelectric detector with a flat spectral response. It is shown that the main challenge is to achieve a high finesse in spite of nonperfect parallelism, mirror curvature, and the additional phase shift caused by the Bragg reflectors.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
