Abstract
Diamond-like carbon (DLC) films were deposited on Si wafers using a hot filament plasma CVD apparatus and different precursors. We evaluated the tribological properties of DLC films in dry (R.H.<20%) and wet (R.H.>80%) air using a ball-on-plate reciprocating friction tester. The friction coefficient was almost independent of the type of DLC film, except for friction in mild sliding. DLC film wear did not clearly depend on the film type, although moderate differences occurred in structure and composition of three films. The dependence of the friction coefficient on humidity appeared to differ with sliding conditions. Wear in films in dry air was greater than that in wet air. Transferred materials from the DLC film were observed on the friction surface of the mating ball in dry air, but found only negligibly on the ball in wet air in mild sliding. Such transfer behavior appeared to be correlated with film friction.
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