Abstract
The main purpose of this study is to research the tribological properties and mechanical properties of diamond-like carbon coating (DLC) used unbalanced magnetron sputtering system (UBMS). The objective is influence of various Zr target current on the properties of coatings, current from 0.0 A to 0.5 A. The cross-section morphology was observed by field emission scanning electron microscopy (FE-SEM). With the increase of the Zirconium targets current, the quantity contained of the Zirconium increases. Raman spectroscopy, X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) were employed to analyze the microstructure properties of the coatings. The nanoindentation tester was used to measure the mechanical properties. Furthermore, the wear tests were achieved through the Schwingung Reibung and Verschliess (SRV) reciprocating wear tester under dry condition. The DLC coating was deposited used 0.4 A Zr target current possessed the lowest I(D)/I(G) ratio, the highest sp3 content and highest hardness. The DLC coating (0.4A) also displayed excellent tibological properties including the lowest friction coefficient, and wear depth.
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