Abstract
The fabrication and gas flow characterization of an ultra-thin inorganic nanosievestructured by interference lithography and a bond-micromachining approach are reported.The nanosieve has been observed to exhibit transition gas flow behaviour aroundatmospheric pressure and ambient temperature. The small lip thickness (45 nm) of thenanopores with respect to their diameter (120 nm) helps in understanding pure transitionflow by minimizing interactions between the molecule and inner pore wall. Dueto the absence of these collisions, the transition flux is the superimposition ofviscous and molecular fluxes without the need for higher-order slip correction. Thenanosieve shows a flow selectivity of 3.1 between helium and argon at 20 mbar.
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