Abstract
The design and operation of an original transition and rare-earth metal ion source are described. Ions were produced during collisions of evaporated metal atoms with fast electrons. The source delivered the following parameters: (1) an ion energy of (1–20) keV; (2) a total ion current of (1–25)× 10−6 A; (3) an ion current stability of 0.1%; (4) a beam cross-section diameter of (1–12) mm; and (5) a period of 30–60 h of uninterrupted operation on a charge of 1 g of metal under UHV conditions. The peculiarity of the source is the creation of multiple-charged ions Mq+(q=1–6), and some part of these ions are metastable-excited. The testing results and practical applications of a proposed source are demonstrated.
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