TRACK--A new method for the evaluation of low-level extinction coefficient in optical films.

Abstract

We develop a rigorous methodology named TRACK based on the collection of multi-angle spectrophotometric transmission and reflection data in order to assess the extinction coefficient of quasi-transparent optical films. The accuracy of extinction coefficient values obtained by this method is not affected by sample non-idealities (thickness non-uniformity, refractive index inhomogeneities, anisotropy, interfaces, etc.) and therefore a simple two-layer (substrate/film) optical model can be used. The method requires the acquisition of transmission and reflection data at two angles of incidence: 10° and 65° in p polarization. Data acquired at 10° provide information about the film thickness and the refractive index, while data collected at 65° are used for absorption evaluation and extinction coefficient computation. We test this method on three types of samples: (i) a CR-39 plastic substrate coated with a thick protective coating; (ii) the same substrate coated with a thin TiO(2) film; (iii) and a thick Si(3)N(4) film deposited on Gorilla glass that presents thickness non-uniformity and refractive index gradient non-idealities. We also compare absorption and extinction coefficient values obtained at 410 and 550 nm by both TRACK and Laser Induced Deflection techniques in the case of a 1 micron thick TiO(2) coating. Both methods display consistent extinction coefficient values in the 10(-4) and 10(-5) ranges at 410 and 550 nm, respectively, which proves the validity of the methodology and provides an estimate of its accuracy limit.