Abstract
We implement an elegant hardware upgrade in our EUV imaging reflectometer to significantly reduce noise from beam power fluctuations. Our instrument non-destructively characterizes the composition and morphology of samples both transversely and depth-resolved, by implementing an EUV coherent diffractive imaging (CDI) microscope in a variable-angle reflection geometry. This upgrade significantly improves signal-to-noise ratio (SNR) by using an EUV beam splitter to simultaneously monitor the beam intensity before and after reflection from the sample. Fluctuations in power may then be normalized out, resulting in greatly improved SNR — an enhancement of ~6x in our first, non-optimized implementation.
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