Abstract
We present a novel potentially gas-independent thermal flow sensor chip that contains three two-wire calorimetric flow sensors to measure the flow profile and flow direction inside a tube, and a single-wire flow-independent thermal conductivity sensor which detects the type of the gas through a simple DC voltage measurement. All wires have the same dimensions of 2000 µm in length, 5 µm in width and 1.2 µm in thickness. Four different gases Ar, N <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> , Ne and He were used for the thermal conductivity measurement and the measured output voltage corresponds very well with a theoretical model.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
