Abstract

Abstract The topographic evaluation of the nano-scale pattern, on ZnO (001) surface, and its scaling properties have been investigated here after low energy atom beam irradiation. Preferential sputtering promotes the formation of Zn-rich zones near the surface that serve as the nucleation centers for the spontaneous nanostructure growth. The rms roughness ( σ ) however increases with irradiation fluence and displays power law behaviour, σ ∼ t β , for t t c (crossover time) but saturates at longer time scale. In the case of t > t c , σ is independent of irradiation time but interestingly follows the power law behaviour σ ∼ L α , where L is the size of image used in analysis. The morphology of the surfaces has also been investigated using the height-height correlation and power spectral density methods. The observed values of growth ( β ) and roughness ( α ) exponents indicate a scaling behavior that is induced by the disordered but well-defined geometry of the nanostructures.

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