Abstract
We have studied the adsorption of chlorine on the (0001) and (101̄0) surfaces of a titanium single crystal using Auger electron spectroscopy, low-energy electron diffraction (LEED), and thermal desorption spectroscopy. Chlorine adsorbs dissociatively on both surfaces and does not desorb below 750 °C, a temperature limit imposed by the phase change in bulk Ti. Chlorine overlayers are somewhat sensitive to electron-beam stimulated desorption. On the (0001) surface no ordered LEED patterns were observed unless a high-coverage surface was annealed to a temperature of 620 °C. The resulting (16×16) LEED pattern can be interpreted as due to a coincidence lattice on the Ti substrate, with the Cl unit mesh vectors aligned with that of Ti(0001). In contrast to earlier reports, the (101̄0) surface does not appear to reconstruct. On this surface, an annealed Cl overlayer produces simpler LEED patterns, which are probably due to Cl atoms residing in troughs in the (101̄0) surface.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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