Abstract
TiAl films have been produced in various compositions by using the sputter ion plating process. Films sputtered reactively from a target with the composition of TiAl 50:50 at. % have been deposited with a composition of 27.5 at. % Ti, 28.9 at. % Al, and 43.6 at. % N. The crystal structure found was that of sodium chloride with a lattice parameter of 4.20 Å; the microhardness such films was found to be HV 2100–2300. The incorporation of Al into the nitride films improves the oxidation resistance as well as the cutting performances of TiAlN coated drills. TiN films start to oxidize at a temperature level of 550 °C, whereas TiAl coatings react with hot air at a temperature of 800 °C severely. TiAlN coated drills have been tested with two different steels and performed better by a factor >2 compared with TiN coated drills.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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