Abstract
The time-varying mechanism of the positive-ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma was investigated in detail using a quadrupole mass spectrometer equipped with an electrostatic energy analyzer. Time-resolved measurements of the ion composition with respect to the pulse-off period ( Toff ) revealed that the electron temperature ( Te ) just after turning on the pulse is an important factor in determining the ratio of the ionization rates of the Ar+ and C x F y + ions. The time-varying phenomenon of the ion composition was also investigated through a numerical analysis based on the particle balance model, considering the production and loss rates of ions, ion–ion recombination processes, and ion–molecule reactions. When the VHF power ( PVHF ) was increased, a decrease in the ambipolar diffusion loss time constants of the ions ( τlossi ) was observed, and the change in electronegativity was pointed out as the cause of this phenomenon.
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