Time-Resolved Analysis of the Electron Temperature in RF Magnetron Discharges with a Pulsed Gas Injection

Abstract

Pulsed gas injection in a plasma can affect many fundamentals, including electron heating and losses. The case of an asymmetric RF magnetron plasma with a pulsed argon injection is analyzed by optical emission spectroscopy of argon 2p-to-1s transitions coupled with collisional-radiative modeling. For a fully detailed population model of argon 2p levels accounting for direct and stepwise electron-impact excitation in optically thick conditions, a rapid decrease in the electron temperature, Te, is observed during each gas injection with the sudden pressure rise. The opposite trend, with unrealistic Te values before and after each pulse, is observed for analysis based on simple corona models, thus emphasizing the importance of stepwise excitation processes and radiation trapping. Time-resolved electron temperature variations are directly linked to the operating parameters of the pulsed gas injection, in particular the injection frequency. Based on the complete set of data, it is shown that the instantaneous electron temperature monotonously decreases with increasing pressure, with values consistent with those expected for plasmas in which charged species are produced by electron-impact ionization of ground state argon atoms and lost by diffusion and recombination on plasma reactor walls.