Abstract
In this work we present a time-of-flight flow microsensor implemented using surface micromachining in combination with sacrificial layer technology. This approach allows obtaining free-standing polysilicon microfilaments that can be used as heaters or temperature sensors. The obtained microstructure can find applications in many important areas as process and environmental control, biomedicine and instrumentation. Numerical simulation showed a compromise between the size of the device (distance heater to sensor) and the range of volumetric flow to be detected. Also, the proposed structure is suitable for the detection of low volumetric flows and presents a response time of the order of milliseconds. Experimental results demonstrate that the heater can be operated at a temperature of the order of 100{degree sign}C with a power dissipation of ~ 30 mW. Also, tests with the implemented flow sensor structure and characterization apparatus revealed a good agreement with respect to the numerical simulation, confirming the predicted behavior.
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