Abstract
This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micromachined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realised based on a three-dimensional micromachined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone.
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